Dry-etched ultrahigh-Q silica microdisk resonators on a silicon chip
Xiao, Min
- Title
- Dry-etched ultrahigh-Q silica microdisk resonators on a silicon chip
- Authors
- Gu, JX ; Liu, J ; Bai, ZQ ; Wang, H ; Cheng, XY ; Li, GY ; Zhang, MH ; Li, XX ; Shi, Q ; Xiao, M ; Jiang, XS
- Journal
- PHOTONICS RESEARCH
- Volume
- 9
- Issue
- 5
- Year
- 2021
- DOI
- 10.1364/PRJ.412840