3D integration and measurement of a semiconductor double quantum dot with a high-impedance TiN resonator

Oliver III, William F

Title
3D integration and measurement of a semiconductor double quantum dot with a high-impedance TiN resonator
Authors
Holman, N; Rosenberg, D;Yost, D;Yoder, JL ; Das, R;Oliver, WD;McDermott, R; Eriksson, MA
Journal
NPJ QUANTUM INFORMATION
Volume
7
Issue
1
Year
2021
DOI
10.1038/s41534-021-00469-0