Role of dislocations on Sn diffusion during low temperature annealing of GeSn layers
Hu, Jin
- Title
- Role of dislocations on Sn diffusion during low temperature annealing of GeSn layers
- Authors
- Stanchu, H ; Said, A ; Olorunsola, O ; Acharya, S ; Amoah, S ; Zamani-Alavijeh, M ; de Oliveira, FM ; Chhetri, SK; Hu, J ; Mazur, YI ; Yu, SQ ; Salamo, G
- Journal
- Journal of Vacuum Science and Technology B
- Volume
- 41
- Issue
- 5
- Year
- 2023
- DOI
- 10.1116/6.0002957