Fabrication and Analysis of Metallic Nanoslit Structures: Advancements in the Nanomasking Method
- Title
- Fabrication and Analysis of Metallic Nanoslit Structures: Advancements in the Nanomasking Method
- Authors
- S. J. Bauman*, A. A. Darweesh*, D. T. Debu*, J. B. Herzog
- Journal
- Journal of Micro/Nanolithography, MEMS, and MOEMS
- Volume
- 13
- Year
- 2018
- URL
- https://www.spiedigitallibrary.org/journals/journal-of-micro-nanolithography-mems-and-moems/volume-17/issue-01/013501/Fabrication-and-analysis-of-metallic-nanoslit-structures--advancements-in/10.1117/1.JMM.17.1.013501.full?SSO=1
- DOI
- doi:10.1117/1.JMM.17.1.013501
