Nanopore fabrication in amorphous Si: Viscous flow model and comparison to experiment

Li, Jiali

Title
Nanopore fabrication in amorphous Si: Viscous flow model and comparison to experiment
Authors
George, H. B.; Tang, Yuye; Chen, X.I.; Li, Jiali; Hutchinson, J. W.; Golovchenko, J. A.; Aziz, M. J.
Journal
Journal of Applied Physics
Volume
108
Issue
1
Year
2010
Start Page
14310
URL
http://dx.doi.org/10.1063/1.3452390
ISBN/ISSN
0021-8979
DOI