Effect of structure variation on thermal conductivity of hydrogenated silicon film

Salamo, Gregory J.

Title
Effect of structure variation on thermal conductivity of hydrogenated silicon film
Authors
Li, Shibin; Jiang, Yadong; Wu, Zhiming; Wu, Jiang; Ying, Zhihua; Wang, Zhiming; Li, Wei; Salamo, Gregory J.
Journal
Applied Surface Science
Volume
257
Issue
20
Year
2011
Start Page
8326
URL
ISBN/ISSN
0169-4332
DOI
10.1016/j.apsusc.2011.03.107