Selective etching of InGaAs/GaAs(100) multilayers of quantum-dot chains

Salamo, Gregory J.

Title
Selective etching of InGaAs/GaAs(100) multilayers of quantum-dot chains
Authors
Wang, Z.M.; Zhang, L.; Holmes, K.; Salamo, G.J.
Journal
Applied Physics Letters
Volume
86
Issue
14
Year
2005
Start Page
143106
URL
ISBN/ISSN
0003-6951
DOI
10.1063/1.1898425