Sputter-deposited yttrium-barium-copper-oxide multilayer structures incorporating a thick interlayer dielectric material
Salamo, Gregory J.
- Title
- Sputter-deposited yttrium-barium-copper-oxide multilayer structures incorporating a thick interlayer dielectric material
- Authors
- Florence, R.G.; Ang, S.S.; Brown, W.D.; Salamo, G.; Schaper, L.W.; Ulrich, R.K.
- Journal
- Journal of Applied Physics
- Volume
- 79
- Issue
- 4
- Year
- 1996
- Start Page
- 2003
- URL
- ISBN/ISSN
- 0021-8979
- DOI
- 10.1063/1.361052