Investigation of ultra-low-load nanoindentation for the patterning of nanostructures

Salamo, Gregory J.

Title
Investigation of ultra-low-load nanoindentation for the patterning of nanostructures
Authors
Taylor, C.; Prince, R.; Malshe, A.; Riester, L.; Salamo, G.; Cho, S.O.
Journal
Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
Volume
4936
Issue
Year
2002
Start Page
424
URL
ISBN/ISSN
0277-786X
DOI
10.1117/12.476103