Enhancement of thermal conductivity of hydrogenated silicon film by microcrystalline structure growth
Salamo, Gregory J.
- Title
- Enhancement of thermal conductivity of hydrogenated silicon film by microcrystalline structure growth
- Authors
- Li,Shibin;Jiang,Yadong;Wu,Zhiming;Wu,Jiang;Ying,Zhihua;Wang,Zhiming;Li,Wei;Salamo,Gregory J.
- Journal
- Journal of Materials Science-Materials in Electronics
- Volume
- 23
- Issue
- 1
- Year
- 2012
- Start Page
- 224
- URL
- ISBN/ISSN
- 0957-4522
- DOI
- 10.1007/s10854-011-0390-1 ER