Measuring the depth profiles of strain/composition in AlGaN-graded layer by high-resolution x-ray diffraction
Salamo, Gregory J.
- Title
- Measuring the depth profiles of strain/composition in AlGaN-graded layer by high-resolution x-ray diffraction
- Authors
- Kuchuk, AV; Stanchu, HV; Li, C; Ware, ME; Mazur, YI; Kladko, VP; Belyaev, AE; Salamo, GJ
- Journal
- Journal of Applied Physics
- Volume
- 116
- Issue
- 22
- Year
- 2014
- Start Page
- 224302
- ISBN/ISSN
- 0021-8979
- DOI
- 10.1063/1.4904083