Growth Mechanisms Involved in the Synthesis of Smooth and Microtextured Films by Acetylene Magnetron Discharges

by De Vriendt, Valerie; Miladinovic, Sasa M.; Colaux, Julien L.; Maseri, Fabrizio; Wilkins, Charles L.; Lucas, Stephane

The growth of hydrogenated amorphous carbons (a-C:H) produced by continuous or pulsed discharges of acetylene (C(2)H(2)) in an unbalanced magnetron setup was investigated. At 5 x 10(-3) Torr, only smooth films are obtained, whereas at 5 x 10(-1) Ton using a pulsed discharge some microtextured films are formed if the duty cycle is low. The morphology of these microtextured films consists of nanoparticles, filamentary particles, and particular agglomerates ("microflowers"). This paper presents a study of acetylene gas phase polymerization by mass spectrometry, and a detailed analysis of bulk structure of films by combining three techniques which include IR spectroscopy, Raman spectroscopy, and laser desorption/ionization Fourier transform mass spectrometry (LDI-FTMS). Finally, based on the study of gas phase and film structure, we propose a model for the growth of both smooth and microtextured films.

Journal
Langmuir
Volume
27
Issue
14
Year
2011
Start Page
8913
ISBN/ISSN
1520-5827; 0743-7463
PMID
21692461
DOI
10.1021/la2003035