Analysis of Plasma Polymerized Acetylene Films on Silicon Chips by Fourier Transform Mass Spectrometry

by Robotham, Scott A.; Miladinovic, Sasa M.; De Vriendt, Valerie; Lucas, Stephane; Wilkins, Charles L.

Pos. and neg. ion mode laser desorption/ionization-Fourier transform mass spectrometry was used to analyze the films formed by plasma polymn. of acetylene on silicon chips. From the three films discussed here, it can be seen that a bipolar discharge method of plasma polymn. results in a much larger relative no. of hydrocarbon oligomers in the film compared to unipolar discharge and continuous discharge methods. All films showed carbon cluster formation. It was also discovered that in the increasing of the thickness of the film leads to a broader mass range spectrum.