Array of Graphene Variable Capacitors on 100 mm Silicon Wafers for Vibration-Based Applications
Churchill, Hugh O.H
- Title
- Array of Graphene Variable Capacitors on 100 mm Silicon Wafers for Vibration-Based Applications
- Authors
- Gikunda, MN ; Harerimana, F ; Mangum, JM ; Rahman, S ; Thompson, JP ; Harris, CT ; Churchill, HOH ; Thibado, PM
- Journal
- Membranes
- Volume
- 12
- Issue
- 5
- Year
- 2022
- DOI
- 10.3390/membranes12050533