Nanopore sculpting with noble gas ions
Li, Jiali
- Title
- Nanopore sculpting with noble gas ions
- Authors
- Cai, Qun; Ledden, Brad; Krueger, Eric; Golovchenko, Jene A.; Li, Jiali
- Journal
- Journal of Applied Physics
- Volume
- 100
- Issue
- 2
- Year
- 2006
- Start Page
- 24914
- ISBN/ISSN
- 0021-8979
- DOI
- 10.1063/1.2216880