Nanopore sculpting with noble gas ions

Li, Jiali

Title
Nanopore sculpting with noble gas ions
Authors
Cai, Qun; Ledden, Brad; Krueger, Eric; Golovchenko, Jene A.; Li, Jiali
Journal
Journal of Applied Physics
Volume
100
Issue
2
Year
2006
Start Page
24914
ISBN/ISSN
0021-8979
DOI
10.1063/1.2216880