Nanopore fabrication in amorphous Si: Viscous flow model and comparison to experiment
Li, Jiali
- Title
- Nanopore fabrication in amorphous Si: Viscous flow model and comparison to experiment
- Authors
- George, H. B.; Tang, Yuye; Chen, X.I.; Li, Jiali; Hutchinson, J. W.; Golovchenko, J. A.; Aziz, M. J.
- Journal
- Journal of Applied Physics
- Volume
- 108
- Issue
- 1
- Year
- 2010
- Start Page
- 14310
- URL
- http://dx.doi.org/10.1063/1.3452390
- ISBN/ISSN
- 0021-8979