X-ray diffraction study of strain relaxation, spontaneous compositional gradient, and dislocation density in GeSn/Ge/Si(100) heterostructures
Salamo, Gregory J
- Title
- X-ray diffraction study of strain relaxation, spontaneous compositional gradient, and dislocation density in GeSn/Ge/Si(100) heterostructures
- Authors
- Stanchu, H; Kuchuk, AV;Mazur, YI;Margetis, J;Tolle, J;Richter, J;Yu, SQ;Salamo, GJ
- Journal
- SEMICONDUCTOR SCIENCE AND TECHNOLOGY
- Volume
- 35
- Issue
- 7
- Year
- 2020
- DOI
- 10.1088/1361-6641/ab883c