Characterization of ultra-low-load (mu N) nanoindents in GaAs(100) using a cube corner tip

Salamo, Gregory J.

Title
Characterization of ultra-low-load (mu N) nanoindents in GaAs(100) using a cube corner tip
Authors
Taylor, C.R.; Malshe, A.P.; Salamo, G.; Prince, R.N.; Riester, L.; Cho, S.O.
Journal
Smart Materials & Structures
Volume
14
Issue
5
Year
2005
Start Page
963
ISBN/ISSN
0964-1726
DOI
10.1088/0964-1726/14/5/034