Effect of structure variation on thermal conductivity of hydrogenated silicon film
Salamo, Gregory J.
- Title
- Effect of structure variation on thermal conductivity of hydrogenated silicon film
- Authors
- Li, Shibin; Jiang, Yadong; Wu, Zhiming; Wu, Jiang; Ying, Zhihua; Wang, Zhiming; Li, Wei; Salamo, Gregory J.
- Journal
- Applied Surface Science
- Volume
- 257
- Issue
- 20
- Year
- 2011
- Start Page
- 8326
- ISBN/ISSN
- 0169-4332
- DOI
- 10.1016/j.apsusc.2011.03.107