Selective etching of InGaAs/GaAs(100) multilayers of quantum-dot chains
Salamo, Gregory J.
- Title
- Selective etching of InGaAs/GaAs(100) multilayers of quantum-dot chains
- Authors
- Wang, Z.M.; Zhang, L.; Holmes, K.; Salamo, G.J.
- Journal
- Applied Physics Letters
- Volume
- 86
- Issue
- 14
- Year
- 2005
- Start Page
- 143106
- ISBN/ISSN
- 0003-6951
- DOI
- 10.1063/1.1898425