Investigation of ultra-low-load nanoindentation for the patterning of nanostructures
Salamo, Gregory J.
- Title
- Investigation of ultra-low-load nanoindentation for the patterning of nanostructures
- Authors
- Taylor, C.; Prince, R.; Malshe, A.; Riester, L.; Salamo, G.; Cho, S.O.
- Journal
- Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
- Volume
- 4936
- Issue
- Year
- 2002
- Start Page
- 424
- ISBN/ISSN
- 0277-786X
- DOI
- 10.1117/12.476103