High temperature capacitors using AlN grown by MBE as the dielectric
Salamo, Gregory J.
- Title
- High temperature capacitors using AlN grown by MBE as the dielectric
- Authors
- Ghosh, PK ; Sarollahi, M ; Li, C ; White, T ; Debu, DT ; Yan, QG ; Kuchuk, A ; Kumar, R ; Shetty, S ; Salamo, GJ ; Ware, ME
- Journal
- Journal of Vacuum Science & Technology B
- Volume
- 36
- Issue
- 4
- Year
- 2018
- DOI
- 10.1116/1.5033931