Epitaxial growth and characterization of GaAs (111) on 4H-SiC

Salamo, Gregory J.

Title
Epitaxial growth and characterization of GaAs (111) on 4H-SiC
Authors
Das, S ; Eldose, NM; Stanchu, H ; de Oliveira, FM ; Benamara, M ; Mazur, YI ; Chen, Z ; Mantooth, A ; Salamo, GJ
Journal
Journal of Vacuum Science and Technology A
Volume
42
Issue
4
Year
2024
DOI
10.1116/6.0003454