Effects of ion implantation with arsenic and boron in germanium-tin layers
Salamo, Gregory J.
- Title
- Effects of ion implantation with arsenic and boron in germanium-tin layers
- Authors
- Amoah, S ; Stanchu, H ; Abernathy, G ; Kryvyi, S ; De Oliveira, FM ; Mazur, YI ; Li, SD ; Liu, S ; Liu, JF ; Du, W ; Li, BH; Salamo, G; Yu, SQ
- Journal
- Journal of Vacuum Science and Technology B
- Volume
- 42
- Issue
- 3
- Year
- 2024
- DOI
- 10.1116/6.0003565