Modeling Study of Si3N4 Waveguides on a Sapphire Platform for Photonic Integration Applications

Salamo, Gregory J.

Title
Modeling Study of Si3N4 Waveguides on a Sapphire Platform for Photonic Integration Applications
Authors
Zhang, DD ; Yu, SQ ; Salamo, GJ ; Soref, RA ; Du, W
Journal
MATERIALS
Volume
17
Issue
16
Year
2024
DOI
10.3390/ma17164148