Etch-stop method for reliably fabricating sharp yet mechanically stable scanning tunneling microscope tips
- Title
- Etch-stop method for reliably fabricating sharp yet mechanically stable scanning tunneling microscope tips
- Authors
- Basnet,Gobind;Schoelz,James Kevin;Xu,Peng;Barber,Steven D.;Ackerman,Matthew L.;Thibado,Paul M.
- Journal
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Volume
- 31
- Issue
- 4
- Year
- 2013
- Start Page
- 043201
- URL
- http://link.aip.org/link/?JVB/31/043201/1
- ISBN/ISSN
- 1071-1023
- DOI
- 10.1116/1.4812796