Dry-etched ultrahigh-Q silica microdisk resonators on a silicon chip
Xiao, Min
- Title
- Dry-etched ultrahigh-Q silica microdisk resonators on a silicon chip
- Authors
- Gu, JX; Liu, J;Bai, ZQ;Wang, H;Cheng, XY ; Li, GY;Zhang, MH;Li, XX;Shi, Q;Xiao, M;Jiang, XS
- Journal
- PHOTONICS RESEARCH
- Volume
- 9
- Issue
- 5
- Year
- 2021
- DOI
- 10.1364/PRJ.412840