Etch-stop method for reliably fabricating sharp yet mechanically stable scanning tunneling microscope tips

Thibado, Paul

Title
Etch-stop method for reliably fabricating sharp yet mechanically stable scanning tunneling microscope tips
Authors
Basnet,Gobind;Schoelz,James Kevin;Xu,Peng;Barber,Steven D.;Ackerman,Matthew L.;Thibado,Paul M.
Journal
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Volume
31
Issue
4
Year
2013
Start Page
043201
URL
http://link.aip.org/link/?JVB/31/043201/1
ISBN/ISSN
1071-1023
DOI
10.1116/1.4812796