Feedback-controlled ion beam sculpting apparatus
- Title
- Feedback-controlled ion beam sculpting apparatus
- Authors
- Stein, D.M.; Mcmullan, C.J.; Li, J.L.; Golovchenko, J.A.
- Journal
- Review of Scientific Instruments
- Volume
- 75
- Issue
- 4
- Year
- 2004
- Start Page
- 900
- URL
-
- ISBN/ISSN
- 0034-6748
- DOI
- 10.1063/1.1666986
